About: http://webisa.webdatacommons.org/174554027

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, an anisotropic etch such as a plasma etch back of the copper oxide layer may be performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com