About: http://webisa.webdatacommons.org/174663904

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 a is a graph showing the available depth of focus (and DOF tolerance) as a function of spot size consistent with the requirements of link processing;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com