About: http://webisa.webdatacommons.org/174931180

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination.
http://www.w3.org/ns/prov#wasQuotedFrom	osapublishing.org