About: http://webisa.webdatacommons.org/175108934

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gas according to claim 1, wherein said gas is an etching gas for removing a portion of said deposit, and wherein a volume ratio of said hypofluorite to said second gas component in said etching gas is at least 1:4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com