About: http://webisa.webdatacommons.org/17513298

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Optional electrically conductive seed 112 is made of a material such as Ta or NiFeCr and formed to a thickness of between about 5 ??? and 50 ???.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com