About: http://webisa.webdatacommons.org/17514747

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sputter deposition is a physical vapor deposition (PVD) method of depositing thin films by sputtering, or ejecting, material from a ???target???, or source, which then deposits onto a substrate, such as a silicon wafer or glass.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr