About: http://webisa.webdatacommons.org/175324089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a schematic cross sectional view of a system for forming a silicon oxide film illustrating a method of forming a silicon oxide film according to a fifth embodiment of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr