About: http://webisa.webdatacommons.org/175390383

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Likewise, a deposition apparatus such as a plating apparatus may be incorporated in the inspecting apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com