About: http://webisa.webdatacommons.org/175507961

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SiO2, SiOF, boron phosphorus silicate glass (BPSG), etc. can be used as the oxide material including silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com