About: http://webisa.webdatacommons.org/175676334

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ge, it is known that a large grain size of crystallization is provided through crystallizing an amorphous silicon film in the atmosphere including oxygen by exposing the film to a laser beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es