About: http://webisa.webdatacommons.org/17570290

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, initial etching of TEOS, thermal silicon dioxide, and other oxides that are predominately SiO2 occurs at different rates, but the product layer increases in thickness and rates become similar as the ra
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com