About: http://webisa.webdatacommons.org/17581237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More particularly, the invention relates to process controllers principally for controlling temperature and possibly other process variables in thermal reactors and other processors used in semiconductor processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com