About: http://webisa.webdatacommons.org/175844096

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a technique for depositing the metal element-containing film, such a method as evaporation, sputtering, or various types of CVD is applicable.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com