About: http://webisa.webdatacommons.org/175849182

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a material of a target used in the sputtering method, for example, metal including aluminum or metal oxide such as aluminum oxide can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr