About: http://webisa.webdatacommons.org/176442661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To address this challenge, the working time except for the time required for heating the wafer W and for roughly removing heat just after the heating treatment, i.e., the overhead time, should be reduced as much as possible.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au