About: http://webisa.webdatacommons.org/176711682

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a nitride or other suitable material may be selectively etched without substantially etching the underlying conductive layer 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de