About: http://webisa.webdatacommons.org/176775694

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the scatterometry tool 74 is an in-situ tool that is mounted to or integrated with the deposition tool 76.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com