| http://www.w3.org/ns/prov#value | - In FIG. 2, 101 is a substrate, 102 is a comb-electrode, 103 is an electrode pad, 104a is a top of the conductive bump, 104b is a base of the conductive bump, 105 is conductive adhesive, 106 is insulating adhesive, 107 is a package, 108 is an electrode pattern, and 112 is a protective means.
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