About: http://webisa.webdatacommons.org/176872200

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the second interlayer insulating film 21 consists of materials such as BPSG, LP-TEOS and DTEOS. The multi-layer interconnect layers 22 a, 22 b and 22 d consist of materials such as W, Cu and Al.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com