About: http://webisa.webdatacommons.org/176962893

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An illumination system for illuminating an object, such as a system for detecting an alignment mark on a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au