About: http://webisa.webdatacommons.org/176963103

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition to dielectric and conducting layers, the ???barrier layer??? may include metals such as Ti, Ta, W, and Co and their nitrides and suicides, such as TiN, TaN, TaSixNy, TiSixNy, WNx, CoNx and CoSiNx.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com