About: http://webisa.webdatacommons.org/177020933

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Insulating layer 36 may comprise a single insulating layer, such as any of silicon dioxide, silicon nitride, silicon oxynitride, spin-on glass (SOG), doped silicon oxide (BPSG, PSG), polymers and other films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es