About: http://webisa.webdatacommons.org/177027268

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this manner, if both an upper surface and edge inspection are to be performed on a wafer, one of the inspections may be performed, then the parameters of the system may be altered for the other inspection.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com