| http://www.w3.org/ns/prov#value | - In addition, the second conductive layer 106 a is formed of refractory metal such as tungsten (W), chromium (Cr), tantalum (Ta), tantalum nitride (TaN), or molybdenum (Mo), or an alloy or a compound containing the refractory metal as a main component to have a thickness of 300 nm to 600 nm.
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