About: http://webisa.webdatacommons.org/177068965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another feature is a higher resolution than that offered by the step-and-repeat photolithography method with demagnification.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com