About: http://webisa.webdatacommons.org/177172380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a vertical cross sectional view of the wafer chamfer polishing apparatus according to the first embodiment of the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr