About: http://webisa.webdatacommons.org/177197750

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is an illustration of a top view of a polishing table of a conventional rotational chemical mechanical planarization apparatus;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es