About: http://webisa.webdatacommons.org/177208962

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan view illustrating a configuration of a mask pattern used for formation of a diaphragm in the sensor of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com