About: http://webisa.webdatacommons.org/177221429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 13 is a flowchart for explaining a fabrication of devices (i.e., semiconductor chips such as IC and LSI, LCDs, CCDs, etc.) Here, a description will be given of a fabrication of a semiconductor chip as an example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es