About: http://webisa.webdatacommons.org/177239447

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is a process whereby micron-sized mechanical devices are fabricated on silicon wafers by photolithography and etching techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com