About: http://webisa.webdatacommons.org/177254551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a schematic plan view showing a hot plate of the heat treatment apparatus according the embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com