About: http://webisa.webdatacommons.org/177288655

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a magnified cross sectional view of a portion of the embodiment of an M???N array of mirrors fabricated on top of a very large scale integration (VLSI) substrate 33 in accordance with the subject invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au