About: http://webisa.webdatacommons.org/177310634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a simplified plot of a normalized stripping rate vs. radial distance from a wafer center for the circular substrate example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com