About: http://webisa.webdatacommons.org/177385078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a first step in the inventive process, forming a pair of insulating layers and a pair of conductive layers over a substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com