About: http://webisa.webdatacommons.org/17745764

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, technologies using poly-line dimensions smaller than 0.3 ??m, such as 0.14 ??m and even down to 0.1 ??m are now being used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com