About: http://webisa.webdatacommons.org/177878301

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need to protect the gate electrode from fluorine containing implants to prevent penetration thereof through the gate dielectric reaching the channel region (therebelow) in the substrate of the FET device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es