About: http://webisa.webdatacommons.org/177907873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A commercially available solvent, such as a stripping chemical and/or an organic solvent, is supported by supercritical CO2 to remove a resist, its residue, and/or an organic contaminant off the surface of a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es