About: http://webisa.webdatacommons.org/177986394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, semiconductor wafers W of different types may be polished only in their respective polishing positions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com