About: http://webisa.webdatacommons.org/177990892

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although it is described as being formed of polysilicon, it can be formed of any material, including but not limited to insulating material such as oxide or silicon nitride (hereinafter ???nitride???).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com