About: http://webisa.webdatacommons.org/178085359

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the first features may comprise an insulating material, such as silicon oxide, amorphous carbon or silicon nitride, or a semiconductor material, such as polysilicon or amorphous silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com