About: http://webisa.webdatacommons.org/178291125

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	he projecting upper portion of the epitaxial layer is a factor which dominates the shape of the trench UT in which the gate electrode GE is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com