| http://www.w3.org/ns/prov#value | - The opposite electrode was set to be at 60??? C. [0081] When the temperature difference was made less than 0.5??? C. over the entire substrate surface at the substrate temperature of for example 50??? C., the contact holes formed had a vertical side wall and a uniformity of 1% or less for 0.13 ??m contact holes.
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