About: http://webisa.webdatacommons.org/178595935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition of Si3 N4 and SiO2 layer is well-known and is accomplished through techniques such as sputtering or chemical vapor deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr