About: http://webisa.webdatacommons.org/178708758

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The layers, except of the insulating layer 16 made of the magnesium oxide film, were prepared using a DC magnetron sputtering method, respectively.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com