About: http://webisa.webdatacommons.org/178781055

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric 162 can include materials such as including Silicon Nitride (???SiN???), Silicon Carbide (???SiC???), and Tantalum (???Ta???) films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com