About: http://webisa.webdatacommons.org/178907817

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 6, wherein said at least one layer is a material selected from the group consisting of chemically active materials, polymers, insulators, nitrides, oxides, piezoelectrics, ferroelectrics, metals, pyroelectrics,
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com