About: http://webisa.webdatacommons.org/179015137

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, thin film layers can be achieved through the deposition of thin layers of material onto a substrate, by physical vapor deposition such as evaporative or sputtering, or by a chemical process such as chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk