About: http://webisa.webdatacommons.org/179028523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ion doping source gas may comprise at least one halide gas, and the control gas may comprise at least one depositing gas, such as a silane gas.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org