About: http://webisa.webdatacommons.org/179050403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The MEMS device of claim 21, further comprising at least one circuit including components on at least two of the three wafers, wherein the components are in electrical communication by passing signals through the at least one via.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com