About: http://webisa.webdatacommons.org/179059474

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The agreement builds on the long established relationship between the partners who have already collaborated in the past, particularly on the development and optimization of an advanced MOCVD TiN barrier for high aspect ratio TSV.
http://www.w3.org/ns/prov#wasQuotedFrom	spts.com